Novel Rotary Inchworm Motors
نویسنده
چکیده
In this paper, we will demonstrate a family of novel Rotary Inchworm motors using four gap-closing actuators (GCA). Design issues, fabrication process, and expected operation of several rotary motors will be described. The motor is to be batch fabricated using Seth Hollers Silicon-on-Insulator (SOI) plus hinges process. An output torque of the order of nN-m with a torque density in the range of nN-m/mm is theoretically expected when the motor is operated at 30V. A typical Inchworm Rotary motor would measure 1mmx1mmx60μm when the rotor diameter is 200μm. An application of this motor to wave Mickey Mouses hand is suggested.
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